Synchrotron Radiation to study Atomic Layer Deposition

Name: Synchrotron Radiation to study Atomic Layer Deposition
Start: 2016-06-12T20:00:00+02:00
End: 2016-06-15T19:00:00+02:00
Location: ALBA Synchrotron

12–15 Jun 2016

ALBA Synchrotron

CET timezone

Book of Abstracts can be downloaded here: https://indico.cells.es/indico/event/63/material/6/0.pdf

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ALBA Synchrotron
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ihernandez@cells.es

Thin, low roughness Ru films deposited by thermal and plasma enhanced atomic layer deposition using RuO₄ and H₂ at low temperatures

14 Jun 2016, 17:00

20m

oral Talks 4

Mr Matthias Minjauw (Ghent University)

Mr Boris Capon (Ghent University) Dr Christian Dussarrat (Air Liquide) Prof. Christophe Detavernier (Ghent University) Dr Dussarrat Coati (Soleil Synchrotron) Dr Eduardo Solano (Ghent Univesity) Mr Jakob Kuhs (Ghent University) Dr Jolien Dendooven (Ghent University - CoCooN) Kilian Devloo-Casier (Ghent University) Dr Marc Schaekers (IMEC)

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Synchrotron Radiation to study Atomic Layer Deposition

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Thin, low roughness Ru films deposited by thermal and plasma enhanced atomic layer deposition using RuO₄ and H₂ at low temperatures

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