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The detailed programme can be downloaded here:
Topical sessions
Open questions about ALD
ALD community ⇒ SR community
Invited speaker:
Ola Nilsen, University of Oslo
The workshop will start with a typical ALD session comprising one introductory invited lecture and several contributed talks. The goal is to discuss the fundamentals of the ALD technique, to give the SR community insights in how ALD research is usually performed using lab-based techniques and to shed light on the remaining open questions that are difficult to answer using these conventional techniques. We aim for a mix on talks discussing several ALD properties such as the initial growth and nucleation, the conformality, the chemical surface reactions and the film morphology and structure.
SR for studying deposition processes
SR community ⇒ ALD community
Invited speaker:
Salvador Ferrer, ALBA Synchrotron
This session is aimed to give the ALD community an idea of what kind of growth processes and thin film properties can be investigated using SR-based techniques. Following an introductory invited lecture, we aim for contributed talks that demonstrate how x-ray absorption spectroscopy (XAS), small angle x-ray scattering (SAXS), x-ray diffraction (XRD) and photo-emission spectroscopy (PES) techniques can provide valuable insights in deposition processes.
ALD at the synchrotron
ALD community ⇔ SR community
Invited speakers:
Hubert Renevier, Grenoble Institute of Technology
Christophe Detavernier, Ghent University
Joachim Schnadt, Lund University
This session addresses in situ SR-based studies of ALD processes with a focus not only on the results but also on the tackled challenges and problems. How to build an ALD reactor for SR research? What are the crucial components for ALD and what is needed to perform SR experiments? What are the technical challenges and safety requirements that we should take into account? How to handle ALD precursors at the synchrotron?
Poster session
A poster session on June 13th will allow for a profound discussion among the participants.
Open discussion
During the workshop, the attendees will be encouraged to submit questions/issues that will be discussed in an open session on June 15th. Examples of topics for the discussion: To what extent are certain technical compromises acceptable, e.g. slowing down the ALD process to enable real-time measurements or re-exposing the surface to the reactant after a long acquisition? How to deal with irradiation effects of SR on ALD processes?
Visit to ALBA
On June 15th we will offer a tour at the ALBA synchrotron, being the newest 3rd generation synchrotron light source in the Mediterranean area.
Tutorials on synchrotron experiments, data treatment and analysis
The participants will have the opportunity to register for three tutorials that will be given on June 15th. The goal is to demonstrate how to prepare an experiment, and then treat and analyze XAS, GISAXS and PES data having some hands-on experience.
XANES and EXAFS
- X-ray absorption spectroscopy. Basic principles and theory.
- Overview of the technique. How to plan and organize a XANES and/or EXAFS experiment.
- Overview of available open-source software to treat and model XANES and EXAFS data. Basic function of Athena.
- Introduction to data analysis.
GISAXS
- Overview of the technique. How to organize a GISAXS experiment.
- Overview of available open-source software to treat GISAXS data / simulate GISAXS patterns.
- Examples of how data analysis can be performed.
PES
- Photoemission spectroscopy, basic principles
- Overview of the technique, special photoemission methods (resonant photoemission, some aspects of angle resolved PES)
- Data analysis (background, PES cross-sections)
- Examples of PES experiments on ALD samples
