Synchrotron Radiation to study Atomic Layer Deposition

Name: Synchrotron Radiation to study Atomic Layer Deposition
Start: 2016-06-12T20:00:00+02:00
End: 2016-06-15T19:00:00+02:00
Location: ALBA Synchrotron

12–15 Jun 2016

ALBA Synchrotron

CET timezone

Book of Abstracts can be downloaded here: https://indico.cells.es/indico/event/63/material/6/0.pdf

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ALBA Synchrotron
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ihernandez@cells.es

Use of atomic layer deposition for improving pattern transfer in directed self-assembly of PS-b-PMMA

13 Jun 2016, 11:35

20m

oral Talks 1

Mrs Laura Evangelio (IMB-CNM (CSIC))

Prof. Francesc Pérez-Murano (IMB-CNM (CSIC)) Dr Marta Fernández-Regúlez (IMB-CNM (CSIC)) Dr Matteo Lorenzoni (IMB-CNM (CSIC)) Mr Steven Gottlieb (IMB-CNM (CSIC))

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Synchrotron Radiation to study Atomic Layer Deposition

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Use of atomic layer deposition for improving pattern transfer in directed self-assembly of PS-b-PMMA

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