Synchrotron Radiation to study Atomic Layer Deposition

Name: Synchrotron Radiation to study Atomic Layer Deposition
Start: 2016-06-12T20:00:00+02:00
End: 2016-06-15T19:00:00+02:00
Location: ALBA Synchrotron

12–15 Jun 2016

ALBA Synchrotron

CET timezone

Book of Abstracts can be downloaded here: https://indico.cells.es/indico/event/63/material/6/0.pdf

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ALBA Synchrotron
HERALD

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ihernandez@cells.es

Investigation of Si-doped HfO2 ALD films by means of EXAFS and XANES

13 Jun 2016, 17:40

20m

oral Talks 2

Mr Tony Schenk (NaMLab gGmbH)

Dr Massimo Tallarida (ALBA) Mr Tony Schenk (NaMLab gGmbH)

Dr Carlo Mariani (ALBA) Ms Claudia Richter (NaMLab gGmbH) Dr Laura Simonelli (ALBA) Dr Uwe Schroeder (NaMLab gGmbH)

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Synchrotron Radiation to study Atomic Layer Deposition

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Investigation of Si-doped HfO2 ALD films by means of EXAFS and XANES

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