Reviewing the Connection Between Photonics and Semiconductor Device Fabrication
Dr. David Lishan, in collaboration with PhotonExport, will explore plasma fabrication technologies and their use in applications spanning the electromagnetic spectrum. Examples using plasma etching and deposition processes will be highlighted.
David Lishan, Ph.D.
After receiving an undergraduate degree in Chemistry from UC Santa Cruz and Ph.D. from UC Santa Barbara in Solid State Electrical Engineering Dr. Lishan worked and published on a wide range of material, semiconductor, and chemistry R&D projects in the areas of lithography, photochemistry, x-ray mask fabrication, PVD, and plasma processing. During over 25 years at Plasma-Therm, he had business unit management and worldwide technical marketing responsibilities as well as leading the development and release of the plasma dicing system.
In roles as principal scientist and director in technical marketing, he organized and presented plasma processing workshops at over 50 leading institutions and companies throughout the world. His primary focus is on the application of plasma processing for R&D, MEMS, photonics, data storage, power, and compound semiconductor applications. Dr. Lishan is currently working as consultant with PhotonExport to provide semiconductor talks/education services. He holds three patents in the area of semiconductor processing and have over 60 publications and conference presentations.
He has presented plasma processing workshops at leading institutions throughout the world, including Harvard University, UC Berkeley, University of Notre Dame, UC Los Angeles, University of South Florida, Stanford University, Lund University, IMRE, UC Santa Barbara, ISCAS, SINANO, Shanghai Jiao Tong University, UT Austin, Cornell University, Pennsylvania State University, KANC, University of Alberta, Weizmann Institute, University of Queensland, University of New South Wales, Politecnico di Milano, International Iberian Nanotechnology Laboratory, Institute of Microelectronics of Barcelona and many others.